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Titlebook: Simulation of Semiconductor Processes and Devices 2001; SISPAD 01 Dimitris Tsoukalas,Christos Tsamis Conference proceedings 2001 Springer-V

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發(fā)表于 2025-3-28 17:39:29 | 只看該作者
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發(fā)表于 2025-3-28 19:47:26 | 只看該作者
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發(fā)表于 2025-3-29 00:48:57 | 只看該作者
Initial Conditions for Transient Enhanced Diffusion: Beyond the Plus-Factor Approach,stitials and vacancies into account. The model is formulated in terms of effective Frenkel pair numbers and vertical and lateral shift distances between interstitial and vacancy profiles. It is well suited for 1D/2D/3D process simulation.
44#
發(fā)表于 2025-3-29 05:11:46 | 只看該作者
45#
發(fā)表于 2025-3-29 08:42:21 | 只看該作者
Density of States and Group Velocity Calculations for SiO2,gies of interest. Two different crystal structures of SiO2, built-up by the same fundamental unit, namely, the SiO. tetrahedron, are investigated: they are the a-quartz, and the ?-cristobalite..Fig. 3: GV vs. energy for a-quartz and ?-cristobalite. Solid lines: HF; dashed lines: DFT; circles: parabolic-band approximation.
46#
發(fā)表于 2025-3-29 12:03:36 | 只看該作者
47#
發(fā)表于 2025-3-29 18:20:26 | 只看該作者
Conference proceedings 2001r 5–7, 2001, in Athens.The conference provided an open forum for the presentation of the latest results and trends in process and device simulation. The trend towards shrinking device dimensions and increasing complexity in process technology demands the continuous development of advanced models des
48#
發(fā)表于 2025-3-29 22:04:35 | 只看該作者
49#
發(fā)表于 2025-3-30 00:27:14 | 只看該作者
50#
發(fā)表于 2025-3-30 06:56:48 | 只看該作者
,Simplified Inelastic Acoustic—Phonon Hole Scattering Model for Silicon,tics accurately agree with the experimental data at different lattice temperatures, while the population of hot—hole states is significantly enhanced compared to the elastic equipartition approximation. The value of the energy relaxation time to be used in hydrodynamic device simulations is roughly 0.1 ps.
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