Titlebook: Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators; Gerhard Lammel,Sandra Schweizer,Philippe Renaud Book 2002 Sp

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Basics for a Thermally Actuated Micromirror,The following microactuator principle will be used for various applications: a miniature scanning device for barcode reading, a microprojector and a tunable filter in a microspectrometer. The specifications are similar.

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Introduction,tical interference plates. These devices, as part of the so-called MOEMS (Micro Opto Electro Mechanical Systems) family, are primarily intended to be used as key components for linear and two-dimensional light beam scanning as well as for tunable optical filters.

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