Titlebook: Mechanical Microsensors; Miko Elwenspoek,Remco Wiegerink Book 2001 Springer-Verlag Berlin Heidelberg 2001 Gauge.Sensor.deformation.design.

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Book 2001 zerland, and developed and taught by the authors. Support by FSRM is herewith gratefully acknowledged. This book attempts to serve two purposes. First it gives an overview on me- chanical microsensors (sensors for pressure, force, acceleration, angular rate and fluid flow, realized by silicon micro