Titlebook: Lecture Notes on Principles of Plasma Processing; Francis F. Chen,Jane P. Chang Book 2003 Springer Science+Business Media New York 2003 Pl

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Plasma Fundamentals,eated in the . of plasmas. Fortunately , with a few exceptions, the fluid theory of plasmas is all that is required to understand the behavior of low-temperature industrial plasmas, and the quantum mechanical effects of semiconducting solids also do not come into play.

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Inductively Coupled Plasmas (ICPs),ar to the antenna current, but the E-field is more or less parallel to the antenna current and opposite to it. Thus, with a slinky-shaped antenna, the E-field in the plasma would be in the azimuthal direction.

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Book 2003 up to date on current problems such as copper interconnects, low-k and high-k dielectrics, and oxide damage. Students will appreciate the web-style layout with ample color illustrations opposite the text, with ample room for notes..This short book is ideal for new workers in the semiconductor indus