找回密碼
 To register

QQ登錄

只需一步,快速開始

掃一掃,訪問微社區(qū)

打印 上一主題 下一主題

Titlebook: Laser Heat-Mode Lithography; Principle and Method Jingsong Wei Book 2019 Springer Nature Singapore Pte Ltd. 2019 Phase change.Thermal diffu

[復(fù)制鏈接]
查看: 20241|回復(fù): 42
樓主
發(fā)表于 2025-3-21 19:51:27 | 只看該作者 |倒序?yàn)g覽 |閱讀模式
書目名稱Laser Heat-Mode Lithography
副標(biāo)題Principle and Method
編輯Jingsong Wei
視頻videohttp://file.papertrans.cn/582/581509/581509.mp4
概述Systematically describes laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer.
叢書名稱Springer Series in Materials Science
圖書封面Titlebook: Laser Heat-Mode Lithography; Principle and Method Jingsong Wei Book 2019 Springer Nature Singapore Pte Ltd. 2019 Phase change.Thermal diffu
描述.This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applications. It introduces laser heat-mode lithography, where the resist thin films are essentially an opto-thermal response to the laser beam with changeable wavelength and are not sensitive to laser wavelength. Laser heat-mode lithography techniques greatly simplify production procedures because they require neither a particular light source nor a particular environment; further, there are no pre-baking and post-baking steps required for organic photoresists. The pattern feature size can be either larger or smaller than the laser spot by adjusting the writing strategy. The lithographic feature size can also be arbitrarily tuned from nanoscale to micrometer without changing the laser spot size.Lastly, the line edge roughness can be controlled at a very low value because the etching process is a process of breaking bonds among atoms. The book offers an invaluable reference guide for all advance
出版日期Book 2019
關(guān)鍵詞Phase change; Thermal diffusion; Arbitrary pattern writing; Metallo-organic compound; Maskless lithograp
版次1
doihttps://doi.org/10.1007/978-981-15-0943-8
isbn_softcover978-981-15-0945-2
isbn_ebook978-981-15-0943-8Series ISSN 0933-033X Series E-ISSN 2196-2812
issn_series 0933-033X
copyrightSpringer Nature Singapore Pte Ltd. 2019
The information of publication is updating

書目名稱Laser Heat-Mode Lithography影響因子(影響力)




書目名稱Laser Heat-Mode Lithography影響因子(影響力)學(xué)科排名




書目名稱Laser Heat-Mode Lithography網(wǎng)絡(luò)公開度




書目名稱Laser Heat-Mode Lithography網(wǎng)絡(luò)公開度學(xué)科排名




書目名稱Laser Heat-Mode Lithography被引頻次




書目名稱Laser Heat-Mode Lithography被引頻次學(xué)科排名




書目名稱Laser Heat-Mode Lithography年度引用




書目名稱Laser Heat-Mode Lithography年度引用學(xué)科排名




書目名稱Laser Heat-Mode Lithography讀者反饋




書目名稱Laser Heat-Mode Lithography讀者反饋學(xué)科排名




單選投票, 共有 0 人參與投票
 

0票 0%

Perfect with Aesthetics

 

0票 0%

Better Implies Difficulty

 

0票 0%

Good and Satisfactory

 

0票 0%

Adverse Performance

 

0票 0%

Disdainful Garbage

您所在的用戶組沒有投票權(quán)限
沙發(fā)
發(fā)表于 2025-3-21 23:09:51 | 只看該作者
0933-033X yscale lithography, resist thin films, and pattern transfer..This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, whi
板凳
發(fā)表于 2025-3-22 03:03:33 | 只看該作者
地板
發(fā)表于 2025-3-22 07:03:53 | 只看該作者
Laser Heat-Mode Lithography on Transparent Thin Films,irectly fabricate the micro/nano-structures through traditional laser writing lithography because the laser energy cannot be absorbed due to the very low absorption coefficient of transparent thin films in writing laser wavelength.
5#
發(fā)表于 2025-3-22 11:54:42 | 只看該作者
Laser Heat-Mode Grayscale Lithography,uctural change occurs when the temperature exceedscertain threshold. In this process, the interaction between laser and materials usually involves structural changes, such as crystallization, oxidization, melting, and solidification.
6#
發(fā)表于 2025-3-22 16:19:24 | 只看該作者
7#
發(fā)表于 2025-3-22 18:24:35 | 只看該作者
0933-033X t size.Lastly, the line edge roughness can be controlled at a very low value because the etching process is a process of breaking bonds among atoms. The book offers an invaluable reference guide for all advance978-981-15-0945-2978-981-15-0943-8Series ISSN 0933-033X Series E-ISSN 2196-2812
8#
發(fā)表于 2025-3-23 00:01:00 | 只看該作者
9#
發(fā)表于 2025-3-23 03:21:33 | 只看該作者
10#
發(fā)表于 2025-3-23 05:51:20 | 只看該作者
 關(guān)于派博傳思  派博傳思旗下網(wǎng)站  友情鏈接
派博傳思介紹 公司地理位置 論文服務(wù)流程 影響因子官網(wǎng) 吾愛論文網(wǎng) 大講堂 北京大學(xué) Oxford Uni. Harvard Uni.
發(fā)展歷史沿革 期刊點(diǎn)評(píng) 投稿經(jīng)驗(yàn)總結(jié) SCIENCEGARD IMPACTFACTOR 派博系數(shù) 清華大學(xué) Yale Uni. Stanford Uni.
QQ|Archiver|手機(jī)版|小黑屋| 派博傳思國際 ( 京公網(wǎng)安備110108008328) GMT+8, 2025-10-9 16:51
Copyright © 2001-2015 派博傳思   京公網(wǎng)安備110108008328 版權(quán)所有 All rights reserved
快速回復(fù) 返回頂部 返回列表
邻水| 台中县| 定西市| 香港 | 九龙县| 旌德县| 罗平县| 商水县| 廉江市| 长治市| 福建省| 保定市| 疏附县| 巢湖市| 天峨县| 防城港市| 成都市| 澄江县| 即墨市| 景东| 蛟河市| 若尔盖县| 原阳县| 绥滨县| 内乡县| 韶关市| 镇雄县| 临猗县| 任丘市| 长顺县| 屏山县| 岳池县| 张家川| 黎城县| 蕲春县| 贵港市| 沁源县| 那曲县| 新郑市| 罗江县| 沙湾县|