| 書(shū)目名稱 | Integrated Chemical Microsensor Systems in CMOS Technology | | 編輯 | Andreas Hierlemann,H. Baltes,Hiroyuki Fujita,Doria | | 視頻video | http://file.papertrans.cn/469/468441/468441.mp4 | | 概述 | Comprehensive survey of existing semiconductor-based devices followed by a detailed description of the benefits of using CMOS-technology | | 叢書(shū)名稱 | Microtechnology and MEMS | | 圖書(shū)封面 |  | | 描述 | .This book, "Integrated Chemical Microsensor Systems in CMOS Technology", provides a comprehensive treatment of the highly interdisciplinary field of CMOS chemical microsensor systems. It is targeted at students, scientists and engineers who are interested in gaining an introduction to the field of chemical sensing since all the necessary fundamental knowledge is included. However, as it provides detailed information on all important issues related to the realization of chemical microsensors in CMOS technology, it also addresses experts well familiar with the field. ..After a brief introduction, the fundamentals of chemical sensing are presented. Fabrication and processing steps that are commonly used in the semiconductor industry are then detailed followed by a short description of the microfabrication techniques, and of the CMOS substrate and materials. Thereafter, a comprehensive overview of semiconductor-based and CMOS-based transducer structures for chemical sensors is given. CMOS-technology is then introduced as platform technology, which enables the integration of these microtransducers with the necessary driving and signal conditioning circuitry on the same chip. In a next | | 出版日期 | Book 2005 | | 關(guān)鍵詞 | CMOS; Chemical sensor; Integrated systems; Microsensors; Monolithic; Sensor; Standard; control; development; | | 版次 | 1 | | doi | https://doi.org/10.1007/b138987 | | isbn_softcover | 978-3-642-06274-2 | | isbn_ebook | 978-3-540-27372-1Series ISSN 1615-8326 Series E-ISSN 2365-0680 | | issn_series | 1615-8326 | | copyright | Springer-Verlag Berlin Heidelberg 2005 |
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